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发表于 2005-1-6 12:50:53
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来自 上海大学
Re:新人求救
A SIX-DEGREE-OF-FREEDOM MEASUREMENT SYSTEM FOR
THE MOTION ACCURACY OF LINEAR STAGES
Abstract—This paper presents a new six-degree-of-freedom measurement system (6DMS) which has the
capability to measure simultaneously all six motion errors of a linear stage. This system employs three parallel
laser beams to detect three relative linear distances of a moving body by Doppler effect so that the positioning,
yaw and pitch errors can be separated. With an additional beam splitter and two quadrant photodetectors to
detect the lateral shifts of the returned beams, the remaining two straightness errors and roll error can be obtained
at the same time. In comparison with the HP5528A system, the accuracy of the positioning error is about 0.01 mm
to the range of 10 m, the straightness error is about 1 mm within the measuring range of ± 0.1 mm, and angular
errors are all about 1 arcsec within the range of ± 50 arcsecs. This system is simple in principle and can be
easily equipped to any moving stages, such as linear stages, X–Y tables, CMMs, and machine tools. |
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