先奉献几个MEMS(ROM, especailly to comb drive)实例! 欢迎您添加其他有关MEM的A

jinqinghai

下面是一些关于comb drive 的图形:

limate

what do you want? How to open PNG file? All are related to electrostatic forces.

jinqinghai

Dear limate:

Wish to get the variation of the comb-drive displacement versus the driving voltage at different finger thickness of rotary electrostatic comb-drive actuators.

PNG file can be openned by many software downloaded from internet.

Of course, It is great to get some practice tutorials or analysis product with detailed process.

Anyway, thank your response!

jinqinghai

Refer to http://www.xansys.org/lurker/message/20040415.094317.96adc444.en.html
finish
/clear

/prep7
!Geometriedaten

a_la=2250 !Länge des Aktors
fd_br=108 !spring´s width
fd_kp=108 !Federkopf
fd_la=1922 !spring´s length
lu_sp=112 !airgap between the spring
fd_ti=80 !spring´s depth
el_ti=445 !electrode´s depth
el_br=20 !width of electrode
st_lu=60 !Gap between two electrodes
el_lu=20 !(st_lu-el_br)/2
fr_br=30 !fringing field
a_br=5*el_br+4*el_lu !Breite des Aktors ohne Federn
zw_lu=5 !initial gap
uv=300 !Supply voltage

et,1,solid122 !Silizium/Structural
et,2,solid122,,,,,,,1 !Luft/Elektrostatic

EMUNIT,EPZRO,8.85e-6 !Permittivität des leeren Raumes
MP,PERX,2,1 !Luftpermittivität

MP,PERX,1,1
!*******************************************

k,1,el_br/2
k,2,a_br/2
k,3,a_br/2,fd_br
k,4,a_br/2,a_la-fd_br
k,5,a_br/2,a_la
k,6,el_br/2,a_la
k,7,a_br/2+lu_sp
k,8,a_br/2+lu_sp,fd_br
k,9,a_br/2+lu_sp,fd_la+fd_br
k,10,a_br/2+lu_sp+fd_br
k,11,a_br/2+lu_sp+fd_br,fd_la
k,12,a_br/2+lu_sp+fd_br,fd_la+fd_br

kgen,2,7,12,1,4*fd_br+4*lu_sp

k,19,a_br/2+fd_br+2*lu_sp
k,20,a_br/2+fd_br+2*lu_sp,fd_la
k,21,a_br/2+fd_br+2*lu_sp,fd_la+fd_br
k,22,a_br/2+2*fd_br+2*lu_sp,fd_la+fd_br
k,23,a_br/2+2*fd_br+2*lu_sp,fd_br
k,24,a_br/2+2*fd_br+2*lu_sp

kgen,2,19,24,1,4*fd_br+4*lu_sp

k,31,a_br/2+2*fd_br+3*lu_sp,a_la-fd_br-fd_la
k,32,a_br/2+2*fd_br+3*lu_sp,a_la-fd_br
k,33,a_br/2+2*fd_br+3*lu_sp,a_la
k,34,a_br/2+3*fd_br+3*lu_sp,a_la
k,35,a_br/2+3*fd_br+3*lu_sp,a_la-fd_la
k,36,a_br/2+3*fd_br+3*lu_sp,a_la-fd_br-fd_la

kgen,2,31,36,1,4*fd_br+4*lu_sp

k,43,a_br/2+3*fd_br+4*lu_sp,a_la-fd_la-fd_br
k,44,a_br/2+3*fd_br+4*lu_sp,a_la-fd_la
k,45,a_br/2+3*fd_br+4*lu_sp,a_la
k,46,a_br/2+4*fd_br+4*lu_sp,a_la
k,47,a_br/2+4*fd_br+4*lu_sp,a_la-fd_br
k,48,a_br/2+4*fd_br+4*lu_sp,a_la-fd_la-fd_br

kgen,2,43,48,1,4*fd_br+4*lu_sp
kgen,2,29,30,1,3*lu_sp+2*fd_br
kgen,2,52,53,1,lu_sp

k,59,0,0,-el_ti
k,60,el_br/2,0,-el_ti
kgen,2,59,60,1,0,a_la

k,63,0,0,-2*el_ti+zw_lu
k,64,0,0,-2*el_ti-fd_ti+zw_lu
kgen,2,63,64,1,st_lu/2

k,67,st_lu/2+el_br,0,-2*el_ti-fd_ti+zw_lu
kgen,2,66,67,1,0,0,el_ti+fd_ti !nanti buang lagi el_br

k,73,a_br/2+lu_sp+fd_br,fd_br
k,74,a_br/2+lu_sp,fd_la
k,75,el_br/2,fd_br
k,76,el_br/2,a_la-fd_br
k,77,,fd_br
k,78,,a_la-fd_br
k,79,el_br/2,fd_br,-el_ti
k,80,0,fd_br,-el_ti
k,81,el_br/2,a_la-fd_br,-el_ti
k,82,0,a_la-fd_br,-el_ti
k,83,a_br/2+2*lu_sp+2*fd_br,fd_la
k,84,a_br/2+2*lu_sp+fd_br,fd_br
k,85,a_br/2+2*fd_br+3*lu_sp,a_la-fd_la
k,86,a_br/2+3*fd_br+3*lu_sp,a_la-fd_br
k,87,a_br/2+4*fd_br+4*lu_sp,a_la-fd_la
k,88,a_br/2+3*fd_br+4*lu_sp,a_la-fd_br
k,89,a_br/2+5*fd_br+5*lu_sp,fd_br
k,90,a_br/2+4*fd_br+5*lu_sp,fd_la
k,91,a_br/2+5*fd_br+6*lu_sp,fd_br
k,92,a_br/2+6*fd_br+6*lu_sp,fd_la
k,93,a_br/2+6*fd_br+7*lu_sp,a_la-fd_la
k,94,a_br/2+7*fd_br+7*lu_sp,a_la-fd_br
k,95,a_br/2+8*fd_br+8*lu_sp,a_la-fd_la
k,96,a_br/2+7*fd_br+8*lu_sp,a_la-fd_br

a,1,2,3,75
a,2,7,8,3
a,8,73,11,74
a,11,20,21,12
a,19,24,23,84
a,24,13,14,23
a,13,16,89,14
a,17,26,27,18
a,25,30,29,91
a,30,56,55,29
a,53,58,57,52
a,49,54,95,50
a,42,49,50,41
a,37,42,41,93
a,47,38,39,46
a,43,48,87,44
a,36,43,44,35
a,31,36,35,85
a,4,32,33,5

a,59,60,79,80 !A20
a,63,65,66,64 !A21

k,70
k,71,0,a_la

a,70,1,75,77 !A22

k,72,st_lu/2+el_br,,-2*el_ti
a,66,67,72,65 !A23
a,65,72,69,68 !A24
a,7,10,73,8 !A25
a,74,11,12,9 !A26
a,75,3,4,76 !A27
a,76,4,5,6 !A28
a,77,75,76,78 !A29
a,78,76,6,71 !A30
a,80,79,81,82 !A31
a,82,81,62,61 !A32
a,84,23,83,20 !A33
a,20,83,22,21 !A34
a,85,35,86,32 !A35
a,32,86,34,33 !A36
a,44,87,47,88 !A37
a,88,47,46,45 !A38
a,14,89,17,90 !A39
a,90,17,18,15 !A40
a,91,29,92,26 !A41
a,26,92,28,27 !A42
a,93,41,94,38 !A43
a,38,94,40,39 !A44
a,50,95,53,96 !A45
a,96,53,52,51 !A46

asel,s,area,,20
asel,a,area,,31
asel,a,area,,32
vext,all,,,,,el_ti !V1

allsel

asel,s,area,,22
asel,a,area,,30
asel,a,area,,29
vext,all,,,,,fd_ti !V1

allsel

asel,s,area,,23
asel,a,area,,21
asel,a,area,,24
vext,all,,,,a_la !V2
allsel

asel,s,loc,z,0
vext,all,,,,,fd_ti !V3

allsel

block,0,a_br/2+9*lu_sp+8*fd_br,-fr_br,a_la+fr_br,-2*el_ti-fd_ti,fd_ti

vovlap,all

vsel,s,volu,,1,59
vatt,1,,1

vsel,all

esize,,1
lesize,229,,,6
lesize,255,,,6
lesize,288,,,6
lesize,314,,,6

lesize,386,,,15
lesize,379,,,15
lesize,372,,,15
lesize,365,,,15
lesize,358,,,15
lesize,351,,,15
lesize,344,,,15
lesize,208,,,15
lesize,331,,,10
lesize,166,,,10
lesize,101,,,10
lesize,180,,,10
lesize,188,,,10
lesize,187,,,10
lesize,189,,,8
lesize,145,,,8
lesize,146,,,8
lesize,157,,,8

vmesh,1,59

vsel,s,volu,,60
aslv,s,1
aatt,2,,2
vsel,all

vsymm,x,all !generiert die gesamte Aktor
nummrg,node,1e-5
nummrg,kp,1e-3

vsel,s,volu,,60
vsel,a,volu,,94
vglue,all
cm,air,volu

allsel

type,2
mat,2
mshape,1,3D
smrtsiz,1
mshkey,0
vmesh,60
vmesh,94
allsel

vsel,s,type,,1,
vsel,u,volu,,7,10
vsel,u,volu,,29
vsel,u,volu,,32
aslv,s,1
cm,rotora,area
nslv,s,1
cm,rotor,node !rotor teil
allsel

vsel,s,volu,,1,6
aslv,s,1
cm,elektroda,area
nsla,s,1
cm,elektrode,node
allsel

vsel,s,volu,,7,10
vsel,a,volu,,29
vsel,a,volu,,32
aslv,s,1
cm,sttora,area !stator
nslv,s,1
cm,sttor,node
allsel

cmsel,s,sttora !Stator teile selektieren
da,all,volt,0

cmsel,s,elektroda !Rotor teile selektieren
da,all,volt,uv !Zuweisung der Spannung

allsel,all

et,1,0
physics,write,ELECTROS
physics,clear

et,1,45
et,2,0

MP,EX,1,169e3 !Elastizitätsmodul von Silizium
MP,NUXY,1,0.22 !Minor Poisson´s Quotient
MP,DENS,1,2.32e-15 !Massendichte von Silizium

allsel
vsel,s,type,,1 !Randbedingung
aslv,s,1
asel,r,loc,x,a_br/2+8*fd_br+9*lu_sp !Federende
da,all,ux
da,all,uy
da,all,uz

allsel
vsel,s,type,,1
aslv,s,1 !
asel,r,loc,x,-a_br/2-8*fd_br-9*lu_sp !Federende
da,all,ux
da,all,uy
da,all,uz

allsel
cmsel,s,sttora
!nsla,s,1
da,all,ux
da,all,uy
da,all,uz
allsel,all

cmsel,s,sttora
cmsel,a,rotora
cmsel,a,elektroda
cm,aktor,area
allsel,all

physics,write,STRUCTURE
fini

/solu
ESSOLV,'ELECTROS','STRUCTURE',3,0,'air',,,,3

jinqinghai

refer to http://www.xansys.org/lurker/message/20051128.170601.be1ce096.en.html

Highspeed-Freiheit. Bei GMX supergünstig, z.B. GMX DSL_Cityflat,
DSL-Flatrate für nur 4,99 Euro/Monat*  http://www.gmx.net/de/go/dsl
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finish
/clear,start
/filname,simple
/output
/prep7

! The purpose of the code is to validate the capacitive response of a circular
! diaphragm. Theoretical resutls for this have been calculated from the equation
!
! C = (e0 * A)/(d - w)
!
! where w is the deflection of the diaphragm
!
! w(a,p) = (p * (a^2 - r^2)^2)/(64 * D)
!
! Applying a pressure of p = .1 MPa to the surface of the diaphragm will give a
! capacitance of .718 pf and a center deflection of .912 um. At zero pressure
! the capacitance is equal to .695 pf.

!*******************************************************************
!
! Enter the Capacitor Plate Parameters (um)
!
!*******************************************************************
thick = 20 ! Thickness (um)

rad = 500 ! Radius (um)

dist = 10 ! Distance between plates (um)

e0 = 8.854e-6 ! Permitivity of Free Space (pF/um)

p_low = 0.0 ! Lowest Pressure Tested

p_high = 0.1 ! Highest Pressure Tested

points = 2 ! Number of data points to be taken

p_step = (p_high-p_low)/(points-1) ! Delta Pressure between each data point

!*******************************************************************
!
! Generate the plate volumes.
!
!*******************************************************************
rectng,0,-rad,0,thick
rectng,0,-rad,-dist,-dist-thick

vrotat,all,,,,,,2,3,360

allsel
nummrg,all

!*******************************************************************
!
! Mesh the capacitor plates.
!
!*******************************************************************
et,1,45
mshape,0,3d
mshkey,1
mat,1

type,1
esize,20
vmesh,1,8

mp,ex,1,160e3 ! Modulus of Elasticity (MPa)
mp,prxy,1,.066 ! Poison's Ratio

!*******************************************************************
!
! Create two groups to be the conductor surfaces.
!
!*******************************************************************
allsel
nsel,s,loc,y,0
csys,5
nsel,u,loc,x,rad
cm,cond1,node ! the first conductor
csys,0

allsel
nsel,s,loc,y,-dist
csys,5
nsel,u,loc,x,rad
cm,cond2,node ! the second conductor
csys,0

!*******************************************************************
!
! Apply boundary conditions to the plates.
!
!*******************************************************************
allsel
nsel,s,loc,y,-dist-thick
d,all,ux,0
d,all,uy,0
d,all,uz,0 ! Clamp the bottom nodes

csys,5
allsel
nsel,s,loc,x,rad
d,all,ux,0
d,all,uy,0
d,all,uz,0 ! Clamp the edges

!*******************************************************************
!
! Mesh between the plates with capacitor elements.
!
!*******************************************************************
allsel
cmsel,s,cond1

! The nodes on cond1 will match up with the nodes on cond2 because each
! plate has the same mesh. Between each offset node on the two plates a
! capacitor element (trans126) will be created as a discrete representation
! of the capacitance immediately surrounding that element. The area of the
! discrete capacitors needs to be calculated; this is done by counting all
! the nodes on one of the plate's surface, then taking the total area of the
! plate and dividing it by the number of nodes. The area is then multiplied
! by the permitivity of free space to create the constant c0, which is an
! input for the capacitor element.

*get,count,node,0,count
pi=acos(-1)
myarea =pi*rad*rad
elem_area = myarea/count ! Calculate the area of each transducer element
c0 = e0*elem_area

et,2,126,,2,,1,,1
type,2
r,2,,,dist
rmore,c0
real,2

csys,0

allsel
cmsel,s,cond1
cmsel,a,cond2

xxx=0.00001 ! A small tollerance

eintf,,,high,0,0,dist+xxx,0 ! Generate capacitor elements between the plates

!*******************************************************************
!
! Apply boundary conditions to the capacitor elements.
!
!*******************************************************************
allsel
cmsel,s,cond1,node
d,all,volt,0

allsel
cmsel,s,cond2,node
d,all,volt,0

finish

!*******************************************************************
!
! Dimension vectors for the output.
!
!*******************************************************************
*dim,pressure(1,1),table,points,1
*vfill,pressure(1,0),ramp,1,1

*dim,total_capacitance(1,1),table,points,1
*vfill,total_capacitance(1,0),ramp,1,1

!*******************************************************************
!
! Solve using a loop.
!
!*******************************************************************
*do,i,0,points-1

/solu

!*******************************************************************
!
! Calculate the pressure and apply it to the top plate.
!
!*******************************************************************
pressure(i+1) = p_low+i*p_step

allsel
sfadele,all,,pres
sfa,4,,pres,pressure(i+1) ! Pressure on the top surface of the diaphragm
sfa,12,,pres,pressure(i+1)
sfa,20,,pres,pressure(i+1)
sfa,28,,pres,pressure(i+1)

allsel
antype,static
solve
save
finish

/post1

!*******************************************************************
!
! Extract the Capacitance.
!
!*******************************************************************
allsel
esel,s,type,,2

set,first
etable,cap,nmisc,7
ssum ! Sum the capacitance of the capacitor elements (in parallel)

*get,cap,ssum,0,item,cap

total_capacitance(i+1) = cap

finish
*enddo

/post1

*cfopen,output,xls ! Write the results to a file
*vwrite,total_capacitance(1,1),pressure(1,1)
(F8.5)
*cfclose

*vplot,pressure,total_capacitance
/axlab,y,Capacitance (pF)
/axlab,x,Pressure (MPa)
/replot ! Plot the results

jinqinghai

FINISH
/CLEAR
/FILNAME,RCOMB
/PREP7

!!! =========the input parameters

DIFF=0.01            !!! the tolerance of difference
THKRS=2              !!! THE THICKNESS OF STATIONAR FINGER
THKRR=2              !!! THE THICKNESS OF ROTATIONARY FINGER
   gaprr=15          !!! THE GAP BETWEEN ROTATIONARY FINGERS
RRI=40               !!! THE INSIDE RADIUS OF ROTATIONARY FINGER
    !RRO=105           !!! THE OUTSIDE RADIUS OF ROTATIONARY FINGER
                       !!! rro=gaprr*(fnumrr-1)+rri+inirr+fwidthrr
INIRR=15             !!! THE INITIAL DISTANCE OF ROTATIONARY FINGER
INIRS=5              !!! the initial distance of stationary finger
WRR=10               !!! THE WIDTH OF THE ROTATIONARY COMB MASS BLOCK
WRS=10               !!! THE WIDTH OF THE STATIONARY COMB MASS BLOCK
RRANGLE=40           !!! the angle of rotationary comb (lower part)
RSANGLE=40           !!! the angle of stationary comb (upper part)
COMB12ANGLE=60       !!! THE ANGLE BETWEEN THE TWO COMBS
FWIDTHRR=5           !!! THE WIDTH OF THE ROTATIONARY FINGERS
FWIDTHRS=5           !!! THE WIDTH OF THE STATIONARY FINGERS
FNUMRS=8             !!! THE NUMBER OF STATIONARY FINGERS

!!! ========the derived parameters

FNUMRR=FNUMRS-1                                  !!! THE NUMBER OF ROTATIONARY FINGERS
TRSOVLP=RRANGLE+RSANGLE-COMB12ANGLE              !!! THE OVERLAPPED ANGULAR DEGREE
                                                 !!! BETWEEN STATIONERY AND ROTATIONARY COMB
  rro=gaprr*(fnumrr-1)+rri+inirr+fwidthrr        !!! the outside radius of rotationary finger
  !!! GAPRR=(RRO-RRI-INIRR-FWIDTHRR)/(FNUMRR-1)  !!! THE GAP BETWEEN ROTATIONARY FINGERS
GAPRS=GAPRR                                      !!! THE GAP BETWEEN STATIONARY FINGERS
FGAP=(GAPRR-FWIDTHRR-FWIDTHRS)/2

RSI=RRI+INIRR-FGAP-FWIDTHRS-INIRS                !!! THE INSIDE RADIUS OF STATIONARY FINGER
RSO=RSI+(FNUMRS-1)*GAPRS+FWIDTHRS+INIRS          !!! THE OUTSIDE RADIUS OF STATIONARY FINGER

!!! ========DRAWING KP FOR ROTATIONARY COMB (lower part)

CSYS,0
K,101, RRI                  ,WRR/2
K,102, RRI                  ,-WRR/2
K,103, RRO                  ,-WRR/2
K,104, RRO                  ,WRR/2
K,105, RRI+INIRR            ,  0   !!! WRR/2
K,106, RRI+INIRR+FWIDTHRR   ,  0   !!! WRR/2

  KGEN,FNUMRR,105,106,1,GAPRR,0,0,10,

KSEL,S,LOC,X,RRI-DIFF,RRO+DIFF
KSEL,R,LOC,Y,0, WRR/2+DIFF

CSYS,0
!KGEN,2,105,106+(FNUMRR-1)*10,10,0,-WRR/2,0,FNUMRR*10
!KGEN,2,105,106+(FNUMRR-1)*10,10,0,-WRR/2,0,FNUMRR*10

CSYS,0
KSEL,S,LOC,X,RRI-DIFF,RRO+DIFF
KSEL,R,LOC,Y,-DIFF,DIFF

*GET, KP1ST,KP,0,NUM,MIN
KP2ST=KP1ST+1

CSYS,1
KGEN,2,KP1ST,KP1ST+(FNUMRR-1)*10,10,0,RRANGLE,0,FNUMRR*10
KGEN,2,KP2ST,KP2ST+(FNUMRR-1)*10,10,0,RRANGLE,0,FNUMRR*10

!!! =========DRAWING KP FOR STATIONARY COMB (upper part)

WPROT,COMB12ANGLE,
CSWPLA,11,1,1,1  !!! pay attention to ratios for x,y axis
CSWPLA,12,0,

CSYS,12
K,501, RSI    , WRS/2
K,502, RSI    ,-WRS/2
K,503, RSO  , WRS/2
K,504, RSO  ,-WRS/2

   K,507,RSI+INIRS,            !!! not 505
   K,508,RSI+INIRS+FWIDTHRS    !!! not 506

   KGEN,FNUMRS,507,508,1,GAPRS,0,0,10,

CSYS,12
KSEL,S,LOC,X,RSI-DIFF,RSO+DIFF
KSEL,R,LOC,Y,-DIFF,DIFF

*GET, KP10ST,KP,0,NUM,MIN
KP20ST=KP10ST+1

CSYS,11 !!! IT IS IMPORTANT TO CREATE THE ARCTICAL LINES AND AREAS
KGEN,2,KP10ST,KP10ST+(FNUMRS-1)*10,10,0,-RSANGLE,0,FNUMRS*10
KGEN,2,KP20ST,KP20ST+(FNUMRS-1)*10,10,0,-RSANGLE,0,FNUMRS*10

KSEL,ALL
KPLOT
/PNUM,KP,1

NUMSTR,AREA,101
    csys,0  !!! it is critical to its shape of the area
A,101,102,103,104
    csys,11
*DO,I,1,FNUMRR,1
  STEP1=(I-1)*10
  A,105+STEP1,106+STEP1,106+STEP1+FNUMRR*10,105+STEP1+FNUMRR*10
*ENDDO

NUMSTR,AREA,501
    csys,0   !!! it is critical to its shape of the area
A,501,502,504,503
    csys,11
*DO,J,1,FNUMRS,1
  STEP2=(J-1)*10
  A,507+STEP2,508+STEP2,508+STEP2+FNUMRS*10,507+STEP2+FNUMRS*10
*ENDDO

CSYS,1  !!! *** SAME TO CSYS,11? the starting angle is different

ASEL,S,AREA,,101,101+FNUMRR,1
NUMSTR,AREA,200
numstr,kp,300
!AOVLAP,ALL
AADD,ALL
!aglue,all

ASEL,S,AREA,,501,501+FNUMRS,1
NUMSTR,AREA,600
numstr,kp,700
!AOVLAP,ALL
AADD,ALL
!aglue,all

!NUMSTR,AREA,400
!numstr,kp,400
!CSYS,1
!ASEL,S,LOC,Y,-10,10
!AADD,ALL

!NUMSTR,AREA,800
!numstr,kp,800
!CSYS,1
!ASEL,S,LOC,Y,RRANGLE+DIFF,COMB12ANGLE+10
!AADD,ALL

ALLSEL,ALL
/PNUM,AREA,1
/PNUM,KP,0
APLOT

CSYS,0
NUMSTR,VOLU,1
VEXT,200, , ,0,0,THKRR,,,,

VEXT,600, , ,0,0,THKRS,,,,

!!! ===========DRAWING AREA--AIR
WPROT,-COMB12ANGLE,
WPOFF,-WRS-WRR,-WRR,-THKRS
CSWPLA,13,1,1,1  !!! pay attention to ratios for x,y axis
CSWPLA,14,0,
CSYS,13
CYL4, 0, 0, RSO+3*WRS, 0, RSO+3*WRS, COMB12ANGLE, 3*THKRS

NUMSTR,VOLU,10
!!!NUMSTR,AREA,900

VSEL,ALL
VOVLAP,ALL

CSYS,0
N,1,0,0,0
N,2,0,0,0

!!! rotary comb is        volume 1
!!! stationary comb is    volume 2
!!! air is                volume 10

!!!
/prep7
et,1,123
emunit,epzro,8.854e-6
mp,perx,1,1
smrt,3
vmesh,10

vsel,s,volu,,2  !!! for stationary comb
aslv
nsla,,1
nplot
cm,cond1,node

vsel,s,volu,,1  !!! for rotary comb
aslv
nsla,,1
nplot
cm,cond2,node

alls

/solu
eqslv,jcg
cmatrix,,'cond',2
!!! CMATRIX, SYMFAC, Condname, NUMCOND, GRNDKEY, Capname
!!! Performs electrostatic field solutions and calculates
!!! the self and mutual capacitances between multiple conductors.

!!! Capacitance matricies are stored in file cmatrix .txt
!!! the calculated capacitance is for total comb finger
!!! by default, ANSYS stores the capacitance results in an array named 'cmatrix'
!!! To obtain a curve of capacitance versus stroke, the analysis can be re-run for different positions

fini
/exit

jinqinghai

picture

jinqinghai

comb drive with 8 fingers

jinqinghai

another blade comb drive picture

jinqinghai

!!! CSYS--Activates a previously defined coordinate system.
!!! DSYS--Activates a display coordinate system for geometry listings and plots.
!!! ESYS--Sets the element coordinate system attribute pointer.
!!! RSYS--Activates a coordinate system for printout or display of element and nodal results.

jianghong1973

多谢分享

dhbchina

为什么要设置积分限制呢？？
大家共同学习嘛！

jinqinghai

also click the following website to access,  http://www.simwe.com/forum/viewthread.php?tid=701364

warpopguy

thanks

jinqinghai

都好长时间了, 没有一个人做点奉献, 尽是看贴不回帖的家伙!^_^ (点击的人倒挺多的)
这么搞下去大家还有戏唱吗? 更不谈奉献他们的看家本事了!
大家有问题请找我--blue ocean simulation company
email: em_jinqinghai@yahoo.ca

j10

相当好的例子，静电和结构的耦合。

但是在mems中 residual stress的作用很大的，请问楼主可否加入，residual stress造成的应变应力呢？

snowandice

不错！嗬嗬！

goabroad

挺好的，谢谢
我刚开始学，不太好意思发表意见
如果以后能成为像楼主一样，我会多做贡献的

heusxg

专业微电子、微机电仿真论坛
http://www.iccae.com