Please try to do this(MEMS)
/prep7
et,1,45
mp,ex,1,11e10
mp,nuxy,1,0.3
mp,dens,1,8900
block,,20e-6,0.3e-6,0.6e-6,,-5e-6
vmesh,all !
nsel,s,loc,y,0.3e-6
cm,aaa,node
e m t g e n , ' a a a ' , , , ' u y ' , - 0 . 3 e - 6 , 0 . 0 1 5 e -
6,,8.854e-12
eplot
allsel
finish
save
/solution
nsel,s,loc,z,-1e-9,1e-9
d,all,uz,0
nsel,s,loc,x,-1e-9,1e-9
d,all,ux,0
nsel,s,loc,x,20e-6
d,all,ux,0
d,all,uy,0
d,all,uz,0
cmsel,s,emtpno
d,all,uy,0
d,all,volt,0
cmsel,s,aaa
d,all,volt,100
allsel
antype,trans
nlgeom,on
kbc,1
time,5e-8 ! 5e-8sまで計算
deltim,1e-9,1e-12,1e-8
autots,on
outres,all,all
save
solve
finish
/post26
nseol,2,1,u,y
plvar,2
finish
/post1
set,last
/num,1
plns,s,eqv
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