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小弟近日依循ANSYS的范例从2D Model入门静电结构耦合分析
发现2D的分析结果与文献所使用能量法求解悬臂梁受静电利影响的结果相当一致
于是继续尝试3D Model的分析
但与2D分析结果相差甚远 (15V, 2D= 0.0281um, 3D= 0.03662um )
以下分别是我分析用的2D与 3D Model 的命令流
我已经想破头也尝试许多方法都找不出问题所在
希望在这里的各位高手能帮我解惑
十分感谢
另外不晓得有没有高手知道这样的耦合分析在对称条件上该怎么设定呢?
尤其是在静电分析的时候，使用da,all,SYMM 就可以了吗?
____________________________________________________________________________________________________________
2D-MODEL PULL-IN TEST
fini
/clear
/batch,list
/prep7, Polysilicon beam deflection from an applied voltage
et,1,plane121 ! Temporary(片刻的) element for beam region
et,2,plane121 ! PLANE121 element for air region
emunit,epzro,8.854e-6 ! Free-space permittivity(介電常數), μMKSV units
mp,perx,1,10 ! Relative permittivity for polysilicon
mp,perx,2,11.9 ! Relative permittivity for silicon
mp,perx,3,1 ! Relative permittivity for air
bl=100 ! Beam length (μm)
bh=2.0 ! Beam height
glc=bl/2 ! Center location of ground
gl=100 ! Ground conductor length
gh=2.0 ! Ground conductor thickness
gap=2.0 ! Air gap thickness
d1=25 !mesh
d2=2
d3=5 !air gap mesh
vltg=15 ! Applied voltage
!create beam
K,1,0,0,, $K,2,0,-bh,, $K,3,bl,-bh,, $K,4,bl,0,,
L,1,2 $L,2,3 $L,3,4 $L,4,1
AL,1,2,3,4
TYPE,1,
MAT,1,
LSEL,S,LINE,,2,4,2
LESIZE,all,,,d1
ALLSEL
LSEL,S,LINE,,1,3,2
LESIZE,all,,,d2
ALLSEL
ASEL,S,AREA,,1 ! Mesh beam
AMESH,ALL
ALLSEL
!create substrate
K,5,0,-(bh+gap),, $K,6,0,-(bh+gap+gh),, $K,7,gl,-(bh+gap+gh),, $K,8,gl,-(bh+gap),,
L,5,6 $L,6,7 $L,7,8 $L,8,5
AL,5,6,7,8
TYPE,1,
MAT,2,
LSEL,S,LINE,,6,8,2
LESIZE,all,,,d1
ALLSEL
LSEL,S,LINE,,5,7,2
LESIZE,all,,,d2
ALLSEL
ASEL,S,AREA,,2 ! Mesh beam
AMESH,ALL
ALLSEL
!create air gap
L,2,5 $L,8,3
AL,9,8,10,2
TYPE,2,
MAT,3,
LSEL,S,LINE,,9,10,
LESIZE,all,,,d3
ALLSEL
ASEL,S,AREA,,3 ! Mesh gap
AMESH,ALL
ALLSEL
!create around air
rectng,0,bl,0,bl/2
rectng,bl,bl+bl/2,0,bl/2
rectng,bl,bl+bl/2,-bh,0
rectng,bl,bl+bl/2,-(bh+gap),-bh
rectng,bl,bl+bl/2,-(bh+gap+gh),-(bh+gap)
rectng,bl,bl+bl/2,-(bh+gap+gh+bl/2),-(bh+gap+gh)
rectng,0,bl,-(bh+gap+gh+bl/2),-(bh+gap+gh)
rectng,-bl/2,0,-(bh+gap+gh+bl/2),-(bh+gap+gh)
rectng,-bl/2,0,-(bh+gap+gh),-(bh+gap)
rectng,-bl/2,0,-(bh+gap),-(bh)
rectng,-bl/2,0,-(bh),0
rectng,-bl/2,0,0,bl/2
NUMMRG,node
NUMMRG,ELEM
NUMMRG,KP
FLST,5,20,4,ORDE,18
FITEM,5,12
FITEM,5,14
FITEM,5,-17
FITEM,5,19
FITEM,5,23
FITEM,5,27
FITEM,5,31
FITEM,5,-32
FITEM,5,34
FITEM,5,38
FITEM,5,-39
FITEM,5,41
FITEM,5,-42
FITEM,5,45
FITEM,5,49
FITEM,5,53
FITEM,5,57
FITEM,5,-58
LSEL,S, , ,P51X
LESIZE,all,,,20
ALLSEL
LSEL,s,LINE,,13,35,22
LESIZE,all,,,d1
ALLSEL
LSEL,s,LINE,,20,28,4
LSEL,a,LINE,,46,54,4
LESIZE,all,,,d2
ALLSEL
TYPE,2,
MAT,3,
ASEL,S,AREA,,4,15 ! Mesh gap
AMESH,ALL
ALLSEL
NUMMRG,node
NUMMRG,ELEM
asel,s,area,,3, ! Area for air elements
asel,a,area,,4,15
cm,air,area ! Group air area into component 把area4改名為air, 以後打air就是area3
ALLSEL
! set Voltage
asel,s,area,,1
lsla,s ! Selects those lines contained in the selected areas
dl,all,,volt,vltg ! Apply voltage to beam
asel,s,area,,2
lsla,s
dl,all,,volt,0 ! Ground conductor (not meshed)
allsel,all
et,1,0 ! Set structure to null element type
physics,write,ELECTROS ! Write electrostatic physics file
! *WRITE — Write all appropriate element types, key options, real constants,
! material properties, solution analysis options, load step options,
! constraint equations, coupled nodes, defined components, and GUI
! preference settings to the file specified with the Fname and Ext arguments.
physics,clear ! Clear Physics
et,1,plane82,,,2 ! Define beam element y type 2= Plane strain (Z strain = 0.0)
et,2,0 ! Set air to null element type
mp,ex,1,170e3 ! Set Modulus μN/(μm)^2
mp,nuxy,1,0.23 ! Minor Poisson's ratios
mp,ex,2,190e3 ! Set Modulus μN/(μm)^2
mp,nuxy,2,0.23 ! Minor Poisson's ratios
dl,1,,ux,0 ! Apply beam constraints
dl,1,,uy,0
dl,6,,ux,0 ! Apply beam constraints
dl,6,,uy,0
allsel,all
finish
physics,write,STRUCTURE ! Write structural physics file
ESSOLV,'ELECTROS','STRUCTURE',2,0,'air',,,,20
! Solve coupled-field problem
finish
!physics,read,ELECTROS ! Read electrostatic physics file
!/post1
physics,read,STRUCTURE
/post1
________________________________________________________________________________________________________
3D-MODEL PULL-IN TEST
fini
/clear
/batch,list
/prep7, Silicon beam deflection from an applied voltage
et,1,solid122 ! Temporary(片刻的) element for structure region
et,2,solid122 ! solid122 element for air region
ET,3,PLANE121
emunit,epzro,8.854e-6 ! Free-space permittivity(介電常數), μMKSV units
mp,perx,1,10 ! Relative permittivity for polysilicon
mp,perx,2,11.9 ! Relative permittivity for silicon
mp,perx,3,1 ! Relative permittivity for air
L1=100
L2=20
L3=L1/4
d1=25 !mesh membrane length
d2=10 !mesh membrane width
d3=2 !mesh membrane thickness
d4=2 !mesh air gap
d5=5 !mesh extruded volume
t1=2.0 !silicon substrate thickness
t2=2.0 !air gap thickness
t3=2.0 !polysilicon membrane
V1=15 ! DEFINE up electrode POTENTIAL
V0=0 ! DEFINE GROUND POTENTIAL
!*
!############################create 3D Model ############################
K,1,,,, $K,2,L1,,, $K,3,L1,L2,, $K,4,0,L2,,
L,1,2 $L,2,3 $L,3,4 $L,4,1
AL,1,2,3,4
!divide line of film area
LSEL,S,LINE,,1,3,2
LESIZE,all,,,d1
ALLSEL
LSEL,S,LINE,,2,4,2
LESIZE,all,,,d2
ALLSEL
!mesh film area
TYPE,3,
ASEL,S,AREA,,1
AMESH,ALL
ALLSEL
!extrude silicon substrate volume
TYPE,1,
MAT,2,
ESIZE,0,d3, !ESIZE,0,d3...d3 is the division number of silicon film in z direction
VEXT,1, , ,0,0,t1,,,, !A1 沿著 z方向 t1長度 長element ##記得 A1 最後要消除掉##
ASEL,S,,,1
ACLEAR,ALL
ALLSEL
EPLOT
!extrude air gap volume
TYPE,2,
MAT,3,
ESIZE,0,d4, !ESIZE,0,4...4 is the division number of silicon film in z direction
VEXT,2, , ,0,0,t2,,,, !A2 沿著 z方向 t2長度 長element
!extrude polysilicon membrane volume
TYPE,1,
MAT,1,
ESIZE,0,d3, !ESIZE,0,4...4 is the division number of silicon film in z direction
VEXT,7, , ,0,0,t3,,,, !A7 沿著 z方向 t3長度 長element
!extrude around air volume
TYPE,2,
MAT,3,
ESIZE,0,d5, !ESIZE,0,4...4 is the division number of silicon film in z direction
VEXT,4, , ,L3,0,0,,,, !A4 沿著 X方向 t3長度 長element
VEXT,9, , ,L3,0,0,,,, !A9 沿著 X方向 t3長度 長element
VEXT,14, , ,L3,0,0,,,, !A14 沿著 X方向 t3長度 長element
ESIZE,0,d5, !ESIZE,0,4...4 is the division number of silicon film in z direction
VEXT,12,30,18 ,0,0,L3,,,, !A7 沿著 z方向 L1/2長度 長element
ASEL,S,LOC,Y,L2
ESIZE,0,d5, !ESIZE,0,4...4 is the division number of silicon film in z direction
VEXT,all,, ,0,L3,0,,,, ! 沿著 Y方向 L3/2-L2長度
ASEL,S,LOC,X,0
ESIZE,0,d5, !ESIZE,0,4...4 is the division number of silicon film in z direction
VEXT,all,, ,-L3,0,0,,,, !沿著 -x方向 L3-L1長度 長element
ALLSEL
ASEL,S,LOC,Z,0
ESIZE,0,d5, !ESIZE,0,4...4 is the division number of silicon film in z direction
VEXT,all,, ,0,0,-L3,,,, !沿著 -Z方向 L3-L1長度 長element
ALLSEL
ASEL,S,LOC,Y,0
ESIZE,0,d5, !ESIZE,0,4...4 is the division number of silicon film in z direction
VEXT,all,, ,0,-L3,0,,,, !沿著 -y方向 L3-L1長度 長element
ALLSEL
!NUMMRG,node
!NUMMRG,elem
!NUMMRG,KP
vsel,s,VOLU,,2 ! Volumes for air elements
vsel,a,VOLU,,4,45,
cm,air,VOLU ! Group air Volumes into component 把air的VOLU改名為air
allsel,all
!*
!######################## voltage condition #############################
!*
vsel,s,VOLU,,3 ! volume for polysilicon
ASLV,s ! Selects those areas contained in the selected volumes.
da,all,volt,v1 ! Apply voltage to polysilicon
allsel,all
vsel,s,VOLU,,1 ! volume for silicon
ASLV,s ! Selects those areas contained in the selected volumes.
da,all,volt,v0 ! Ground conductor
allsel,all
!!APPLY voltage v0 on aroubd air boundary
!ASEL,S,LOC,Z,t1+t2+t3+L1/2
!ASEL,A,LOC,Z,-L1/2
!ASEL,A,LOC,X,L1+L1/2
!ASEL,A,LOC,X,-L1/2
!ASEL,A,LOC,Y,L2+L1/2
!ASEL,A,LOC,Y,-L1/2
!da,all,volt,0 ! APPLY GROUND POTENTIAL
!allsel
et,1,0 ! Set structure to null element type
physics,write,ELECTROS ! Write electrostatic physics file
! *WRITE — Write all appropriate element types, key options, real constants,
! material properties, solution analysis options, load step options,
! constraint equations, coupled nodes, defined components, and GUI
! preference settings to the file specified with the Fname and Ext arguments.
physics,clear ! Clear Physics
!STRUCTURE
et,1,solid95 ! Define structure element
et,2,0 ! Set air to null element type
!*Polysilicon*
MP,EX,1,170e3, !楊氏係數 Set Modulus μN/(μm)^2
MP,nuxy,1,0.23, !poisson ratio
!*Silicon*
MP,EX,2,190e3, !楊氏係數
MP,nuxy,2,0.23, !poisson ratio
!*
!######################## boundary condition #############################
!*
DA,16,ux,0
DA,16,uy,0
DA,16,uz,0
DA,1,ux,0
DA,1,uy,0
DA,1,uz,0
allsel,all
finish
physics,write,STRUCTURE ! Write structural physics file
ESSOLV,'ELECTROS','STRUCTURE',3,0,'air',,,,
! Solve coupled-field problem
finish
!physics,read,ELECTROS ! Read electrostatic physics file
!/post1
physics,read,STRUCTURE
/post1 |
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